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Keywords: Residual stress
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Journal Articles
Reduction of the warping of a silicon wafer coated with two thin layers by minimal geometric modifications
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2024) 41 (2): 96–102.
Published: 26 April 2023
... show also the cruciality of stress reduction in the purpose to obtain less wafer deformation. © Emerald Publishing Limited 2023 Emerald Publishing Limited Licensed re-use rights only Finite elements modeling Residual stress Thin films Wafers warping The development of electronic...
Journal Articles
Stress analysis of shielding electrode in chip with pressure sensor embedded in accelerometer
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2019) 36 (1): 35–42.
Published: 07 January 2019
... integrated sensing chips addresses the coefficient of thermal expansion (CTE) mismatch issue. The purpose of this study is to focus on the residual stress analysis of the shielding electrode, which is a metal film that prevents pull-in of proof-mass during anodic bonding in microelectromechanical system...
