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Keywords: Room-temperature deposition
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Journal Articles
Journal:
Microelectronics International
Microelectronics International 1–10.
Published: 15 September 2026
...Xin Yang; Hao-Feng Chen; Junyuan Zhao; Yiyi Hong; Yinfang Zhu; Lixin Cao Purpose This study aims to present room temperature deposition of an Au film buffered by a thin Ti film on a Si wafer that possesses smaller residual stress and better thickness uniformity, contributing to wafer-level...
