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Keywords: SOI-MEMS micromachining
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2023) 40 (4): 239–245.
Published: 02 February 2023
... structures while combining with the low-cost SOI-MEMS micromachining technology. Generally, the power supply for the system is in the form of a square or half cycle of sine waves. When the voltage is applied to the fixed electrodes (3), the current transmits through the V-beams (2) and generates a heat...
