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Keywords: Silicon MEMS accelerometer
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Journal Articles
Optically-detected nonlinear oscillations of single crystal silicon MEMS accelerometers
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2016) 33 (2): 107–115.
Published: 03 May 2016
... 04 05 2015 07 09 2015 18 12 2015 © Emerald Group Publishing Limited 2016 Emerald Group Publishing Limited Licensed re-use rights only Nonlinearity Damping Harmonic Resonance Silicon MEMS accelerometer Micro-electromechanical systems (MEMS) accelerometers...
