Keywords: Silicon substrate
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Journal Articles
Microelectronics International (2012) 29 (1): 35–39.
Published: 20 January 2012
...Yidong Zhang; Weiwei He Purpose The purpose of this paper is to demonstrate the I‐V characteristics of ZnO film on Si substrates with Ag buffer layer by conductive atomic force (C‐AFM). Design/methodology/approach An Ag buffer layer and Zn film was first deposited on silicon substrate by RF...

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