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Keywords: Single-crystal sapphire
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Journal Articles
Journal:
Microelectronics International
Microelectronics International (2022) 39 (4): 175–187.
Published: 24 August 2022
...Yanfu Wang; Xin Wang; Lifei Liu Purpose Lapping is a vital flattening process to improve the quality of processed semiconductor wafers such as single-crystal sapphire wafers. This study aims to optimise the lapping process of the fixed-abrasive lapping plate of sapphire wafers with good overall...
