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Keywords: Titanium film
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Journal Articles
Journal:
Microelectronics International
Microelectronics International 1–10.
Published: 15 September 2026
... 30 03 2026 © 2026 Emerald Publishing Limited 2026 Emerald Publishing Limited Licensed re-use rights only Room-temperature deposition MEMS devices Gold film Titanium film Wafer-level hermetic packaging Au-Si eutectic bonding National Key Research and Development Program...
