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Keywords: Zener diode
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Journal Articles
Fluorine implantation for nanostructured silicon Zener diodes: a study on electrical characterization and reliability
Available to Purchase
Journal:
Microelectronics International
Microelectronics International (2026) 43 (1): 19–26.
Published: 20 November 2025
...Sai Link Lee; Mohamed Fauzi Packeer Mohamed; Chan Lik Tan Purpose This study aims to present a comprehensive investigation into the role of fluorine in enhancing the performance and reliability of P+ doped silicon Zener diodes through a systematic comparison of boron (B11) and boron...
