Keywords: integrated circuit
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Journal Articles
Journal Articles
Microelectronics International (1996) 13 (3): 12–14.
Published: 01 December 1996
...I.E. Klein Taguchi methods were applied to the production of thin RF integrated circuits on alumina. The substrates had 20 via holes of 1 mm in diameter, which led to a perturbation to the homogeneous spread of photoresist (by spinning) adjacent to the holes. Consequently, the overall process yield...

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