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Volume 22, Issue 1
1 March 2002
This article was originally published in
Assembly Automation
Assembly Automation Cover Image for Volume 22, Issue 1
Research Article| March 01 2002

Low friction rotating devices using fluid assisted levitation

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Publisher: Emerald Publishing
Online ISSN: 1758-4078
Print ISSN: 0144-5154
© MCB UP Limited
2002
Assembly Automation (2002) 22 (1): 55–59.
https://doi.org/10.1108/01445150210416682

Describes the fabrication of MEMS micro bearings and the benefits that they provide. Uses the LIGA process with UV light and SU‐8 photoresist to create the structures. A fluid passing through the cavity is used to lift up and levitate the rotor within the confines of the cavity.

Keywords: Bearings, Microstructures
© MCB UP Limited
2002
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