A four‐degree‐of‐freedom microprehensile microrobot on chip

This paper presents a cheap and easy‐to‐produce microprehensile microrobot on chip (MMOC). This four‐degree‐of‐freedom (DOFs) microprehensor is able to grip, hold and release submillimetric‐sized objects. The research conducted relied heavily on the design of a simple and efficient monolithic piezoelectric two‐DOF actuator, requiring no further motion transformation system and asking for no supplementary guiding system. The integration of all these functions in a single part eliminates nearly all assembly concerns. Each finger of the gripper is an actuator, called a duo‐bimorph, which provides higher deflections than piezoelectric tubes. The paper presents the developed MMOC prototype, comments its performances and details the functioning of the duo‐bimorph.