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Purpose
The purpose of this paper is to provide a technical review of silicon micro‐electromechanical systems (MEMS) technology and its applications.
Design/methodology/approach
Following an introduction, the paper describes silicon MEMS fabrication and assembly techniques, considers a selection of commercially important products and their applications and concludes with a brief review of power MEMS research.
Findings
Silicon MEMS fabrication technology is derived from techniques used in semiconductor manufacture and has yielded a diverse and ever‐growing range of sensors, actuators and other miniaturised devices that find applications in a multitude of industries.
Originality/value
This paper provides a detailed technical review of MEMS technology and its applications.
© Emerald Group Publishing Limited
2009
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