Article comprising an inductor
Article comprising an inductor
Keywords: Lucent Technologies, Inductors
Applicant: Lucent Technologies Inc., USAPatent number: EP0986106Publication date: 15 March 2000Title: Article Comprising an Inductor
This invention relates to micro-machined inductors suitable for monolithic integration in integrated circuits. It describes a low loss, micro-machined passively self-assembling inductor. The inductor is fabricated using MEMS technology and advantageously utilises materials compatible with silicon IC fabrication, such that the inductor can be monolithically integrated on a CMOS chip. The inductor includes passive self-assembly means by which the inductor loop is moved away from an underlying substrate, typically silicon, in the final steps of inductor assembly. Such passive self-assembly does not require separate actuation or monitoring steps.
Such a device can be used in microwave and wireless telecommunications circuits and include reactive impedance matching to cancel parasitic capacitance and for use as frequency determining elements in filters and oscillators.
Jonathan Rigelsford
