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Volume 22, Issue 1
1 March 2002
Sensor Review Cover Image for Volume 22, Issue 1
Research Article| March 01 2002

MEMS fabrication

Publisher: Emerald Publishing
Online ISSN: 1758-6828
Print ISSN: 0260-2288
© Company
2002
Sensor Review (2002) 22 (1): 18–33.
https://doi.org/10.1108/02602280210697087

Describes the key attributes of MEMS technology and existing and future business opportunities. Discusses the various stages in the fabrication of MEMS devices and offers guidance regarding the selection of processing methods for deposition, lithography and etching. Also describes the MEMS‐Exchange program and associated network of fabrication centres.

Keywords: Fabrication, Sensors, Semiconductors
© Company
2002
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