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Keywords: SiC MEMS pressure sensor
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Journal Articles
C-shaped SiC piezoresistive array design and electromechanical analysis for peak-stress placement on clamped rectangular pressure diaphragm sensor structure
Available to Purchase
Journal:
Sensor Review
Sensor Review 1–10.
Published: 19 June 2026
... Sumit Kumar Jindal sumitjindal08@gmail.com 10 12 2025 05 02 2026 12 03 2026 01 04 2026 19 04 2026 © 2026 Emerald Publishing Limited 2026 Emerald Publishing Limited Licensed re-use rights only SiC MEMS pressure sensor C-shaped piezoresistors High sensitivity...
