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Keywords: MEMS
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Journal Articles
Journal:
World Journal of Engineering
World Journal of Engineering (2026) 23 (2): 493–504.
Published: 25 March 2025
...Dadasikandar Kanekal; Vaarshini Ravichandran; Priya Shukla; Sumit Kumar Jindal; Suraj Prakash Sahoo Purpose This study aims to develop and assess a multi-turn silicon carbide (SiC) micro-electro-mechanical system (MEMS) piezoresistive pressure sensor designed to measure high pressures from 0 to 40...
