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Keywords: ZrO2
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Journal Articles
Zirconium oxide thin films deposited via DC magnetron sputtering: corrosion and morphological investigation
Available to Purchase
Journal:
World Journal of Engineering
World Journal of Engineering (2025) 22 (2): 379–386.
Published: 19 February 2024
...) magnetron sputtering technique. Design/methodology/approach DC sputtering at different powers – 80, 100 and 120 W – was used to deposit ZrO2 thin films onto different substrates (Si/SS304) without annealing of the substrate. Atomic force microscope (AFM), energy-dispersive X-ray spectroscopy...
