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Boundary limited transport in small compound semiconductor devices is studied within the self‐consistent Monte Carlo method. New stable microscopic models fully accounting for stochastic carrier exchange at boundaries have been developed for ohmic, tunneling, and Schottky barrier boundaries. These new models are demonstrated with applications to the one‐dimensional GaAs resistor, N+‐N‐N+ diode and the N+‐N Schottky diode.

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