An industrial solution to automatic robot calibration and workpiece pose estimation for semiconductor and gene‐chip microarray fabrication

For semiconductor and gene‐chip microarray fabrication, robots are widely used to handle workpieces. It is critical that robots can calibrate themselves regularly and estimate workpiece pose automatically. This paper proposes an industrial method for automatic robot calibration and workpiece pose estimation.

The methods have been implemented using an air‐pressure sensor and a laser sensor.

Experimental results conducted in an industrial manufacturing environment show efficiency of the methods.

The contribution of this paper consists of an industrial solution to automatic robot calibration and workpiece pose estimation for automatic semiconductor and gene‐chip microarray fabrication.