...Ahmed Joubair; Mohamed Slamani; Ilian A. Bonev Purpose The purpose of this paper is to describe a calibration method developed to improve the absolute accuracy of a novel three degrees‐of‐freedom planar parallel robot. The robot is designed for the precise alignment of semiconductor wafers...

... never been in a collision accident. It does not have the absolute accuracy option (i.e. it is not calibrated) nor the advanced shape‐tuning option (for compensating the effects of friction at low speeds). A multi‐purpose end‐effector (well visible in Figures 2 and 4) was used to which up to eight SMRs...