This paper aims to demonstrate thermally robust, chemically stable, high-temperature compatible tubular platform in low temperature cofired ceramics (LTCC) with integrated embedded heating functionality suitable for harsh-environment sensing and microreactor applications. LTCC process flow and fabrication methodology for fabrication of such structures in LTCC has been presented in detail.
Proposed task is to fabricate and characterize tubes in LTCC with integrated microheater pattern. LTCC tapes are formed in desired tube using a mandrel. Dedicated holes are provided at the end of the tube which can be utilized for inlet and outlet of sample liquid for temperature treatment while passing through the tube.
LTCC tube of length 51.5 mm, inner diameter of 5.4 mm and dedicated holes of diameter 2.1 mm with a wall thickness of 0.63 mm has been fabricated. The developed tube with integrated microheater is characterized. The structure provides a peak surface temperature of 150°C at 4.5 W of input power. The central part of tube provided a uniform temperature of variation < 10% across 20 mm length.
LTCC-based tubes are useful for many potential applications including gas sensor, inductors, heated fluidic headers, smart channels, chemical and thermal reaction chambers.
This paper provides an extensive methodology for fabrication of tubes in LTCC. The paper also presents the associated fabrication challenges for producing such tube in LTCC.
