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Sonoscan Ships new Gen5™ C-SAM® model

The first shipments of Sonoscan's Gen5™ scanning acoustic microscope were made during their most recent fiscal quarter. This newest addition to the family of C-SAM® C-Mode instruments was initially introduced at the Semicon West show in July, 2006. Owing to its enthusiastic reception,development was completed and the first customer orders were accepted in late summer.

What sets the Gen5 acoustic microscope apart is a blend of advanced technology – including Sonoscan's TurboSpeede scanning – and ergonomic advantages, including a more accessible scan tower.

The Gen5 transducer scans an enlarged area measuring >12in.×>12in.,enabling it to scan a 300mm silicon wafer or two standard JEDEC trays. Gen5 transducers range from 5MHz (low resolution) to 400MHz (very high resolution).

The new C-SAM acoustic microscope continues the tradition of having the industry's fastest ultrasonic scanner, powered by a precision linear motor that provides unmatched repeatability in the x, y and z-axes of±0.5mm. Included as standard equipment on the Gen5 system is Sonoscan's TurboSpeed scanner that can increase the already fast scan speed by a factor of up to 2.5 without loss of resolution.

Sonoscan's well-known Virtual Rescanning Module™ (VRM), which permits collection of acoustic data for storage as a virtual sample that can be imaged after testing or failure of the physical part, is included in the Gen5 system.

Available for enhancing the capabilities of VRM are the profile imaging module for nondestructive cross- sectioning of the virtual sample, and the Frequency Domain Imaging (FDI™) module to transform an acoustic image into several single-frequency images.

The redesigned scan tower features improved lighting and a larger opening for handling both large and small sample quantities.

In addition to its unparalleled combination of high speed and high resolution, the new system includes the selectable Survey Mode™ that can reduce scan time as much as 75 per cent.

For further information about the Gen5 system, contact Steve Martell, Manager of Technical Support Services, Sonoscan, Inc., 2149 East Pratt Blvd., Elk Grove Village IL 60007; Tel: 847 437-6400; email: info@sonoscan.com;web site: www.sonoscan.com

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