... as their failure physics. It evaluates the transition from Design of Experiments to machine learning ( ML )-driven adaptive control and quantifies the role of nanoindentation. Three comparative tables synthesize the analytical framework. Findings Key original syntheses include Pd as a tuneable kinetic...

... microscope (FESEM), atomic force microscope (AFM) and nanoindentation techniques. Findings The XRD results show that the AlN thin films are highly oriented along the (100) AlN plane at various deposition times indicating the a-axis preferred orientation. All the AlN thin films exhibit hexagonal AlN...