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Computed tomography in the micron range

Keywords: Tomography

Till now, non-destructive testing with high-resolution computed tomography has only been feasible with immense constructions in larger scientific laboratories. Phoenix|X-ray is now closing this technological gap offering a highly resolving CT system for a broad public – the new "v|tome|x"(pronounced: vee-tomex). This novel system is capable of producing a detailed three-dimensional radioscopic visualisation of the sample that can be inspected from all angles in tomographic slices and sections. In contrast to the customary X-ray 2D projection methods, computed tomography can display overlapping parts separately. In particular, for long objects this means that the cross-section becomes accessible at any position along the axis (Plates 2-4).

Plate 2 A cable crimp and sectional cut images

Plate 3 Lead frame and bond wires in an IC package

Plate 4 Sectional cut image of a stacked die with solder failures

The tomographic images are generated by means of the acquisition and reconstruction software "SIXTOS".

Distinct from other CT-setups, the new v|tome|x is equipped with a dedicated,highly stable microfocus X-ray-tube with a maximum high voltage of 225 kV developed by phoenix|X-ray especially for CT, and allows tomographic 3D as well as conventional 2D inspection. The CT tube in combination with a high-contrast|detector (16 bit) achieves an image resolution of down to 4 micron voxel (volume pixel) size. Maximum sample diameter for the standard v|tome|x system is 150 mm (6 in.) with a maximum sample weight of 30 kg (65 lb.)

Etymology

v|tome|x = Volume Tomography with X-rays

For more details, visit the Web site: www.phoenixxray.com

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